Paired-wire carrying current actuators and piezoelectric beam sensors for microelectromechanical systems

Abstract

An alternative actuator for MEMS/NEMS device is proposed and analyzed. The actuator is based on the paired-wires (PW) carrying current concept, which makes the actuator extremely simple and cost-effective. This actuator is implemented in the MEMS/NEMS devices for fatigue and fracture characterization of nanomaterials. For designing the sensor part of this MEMS/NEMS device, a piezoelectric (PZ) beam was used. After designing the actuator and sensor parts of this MEMS/NEMS device, which is called PW–PZ device, the dynamic response of the PW–PZ device is fully investigated. Furthermore, the effects of all important physical parameters on the dynamics response of the PW–PZ device were studied and discussed. Considering the effects of the nanomaterial sample showed an initial design of this actuator and sensor can be used for a broad range of nanomaterial samples regardless of their stiffness or material. This PW–PZ device can be readily integrated into SEM/TEM instruments to provide real time study of the mechanical behaviors of nanomaterial samples as well as their fatigue and fracture properties, softening or hardening behaviors, and initiation and propagation of nanocracks.