Abstract

For commercially available lithium ion batteries, the package structures can account for as much as 70% of its volume. In a multiyear effort, we have developed designs, fabrications, and assembly processes for ultrahigh energy density microbatteries of 5 and 1 mm3. Over the course of the research, the packaging system evolved due to changes or limitation specific to the battery system itself. During the study, improvements in the construction of the housing for the cathodes were made. Anodized aluminum cans fabricated through our in-house micromachining facility replaced the electroformed gold cans used in earlier experiments. Throughout the iteration of the can design, a flange around its open end, which would be used for sealing, was present, and both designs were fabricated as arrays. The ability to fabricate the housings in an array format lends it to be implemented into a scalable production assembly process. Materials evaluated for the cover ranged from copper foil to the final design of metalized sapphire with a plated through via. One area which needed to be addressed was reducing the temperature of the assembly process due to a change in the cell materials. This resulted in developing a low-temperature hermetic sealing process. The seal between the cover and can was made using a novel composite ring of indium and epoxy. The indium provided the hermeticity needed for the battery chemistry and the epoxy provided mechanical robustness. Most of our experience was with sealing temperatures of 100°C, but the sealing temperature is only limited by the cure temperature of the epoxy. One experiment was conducted to look at the reliability of the seal. A dozen 1-mm3 cells were filled with lithium and sealed. They were aged in laboratory ambient environment and periodically weighed. There was no weight gain in any of the cells over the course of several months, but one cell that was opened at the end of the experiment rapidly gained weight as the lithium corroded. The microbattery cell developed in this program used a lithium cobalt oxide cathode in the form of a porous sintered compact. Its bottom surface was coated with a gold film so that it could be thermocompression bonded to a gold bump on the bottom of the can. Following bonding, the cathode assembly was spray coated with a polymer separator. The anode was a piece of lithium metal bonded to the battery cover. After the cover was sealed to the battery can, the cell was filled with electrolyte and charged. Then a plug was inserted in the via through the cover to seal the battery. Batteries assembled in this manner exhibited energy densities in excess of 200 Wh/L for the smaller volumetric package.

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