Abstract

We proposed a DHM system with improved resolution property by using liquid crystal (LC) phase modulator. The LC phase modulator can stably control the phase modulation characteristics of the interference pattern and implements the four‐step phase shifting scheme. The proposed DHM system showed a four‐fold improvement in resolution compared to the conventional DHM with polarized camera. Finally, it was confirmed that the modulation transfer function (MTF) value was improved 2 times at the resolution target of 105 lines/mm.

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