P2.5.3 SiC-FET Sensors for Methanol Leakage Detection

Abstract

Pt and Ir SiC based Field Effect Transistor sensors were tested to detect low concentration of methanol (<200 ppm) for both process control and leak detection applications. Pt sensors gave good and very fast response at 200°C, while Ir sensors gave larger but much slower response. The presence of oxygen improved the response of the sensor which was favorable for the leak detection application. The influence of hydrogen and propene to the sensor response was also studied. Beside the experimental work, the detection mechanism and different sensing behavior of Pt and Ir were studied by quantum chemical calculations.