Abstract
Here, we fabricate organic light‐emitting diodes (OLEDs) with quasi‐periodic nanostructure (QPS) processed both by laser interference lithography (LIL) and reactive ion etching (RIE). The LIL process is used for forming periodic pattern, and on the periodic pattern, the RIE process is supplemented for adding random property. The resulting quasi‐periodic nanostructure is composed of the silicon dioxide (SiO2) having low refractive index, and we were able to obtain enhanced light extraction characteristics of OLEDs in all viewing angle without any spectrum distortion problem, by utilizing each optical advantage of periodic and random structure.
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