Abstract
Aluminum Gallium Nitride (AlGaN) ultraviolet‐C (UV‐C) micro‐light‐emitting diodes (microLEDs) offer significant advantages in terms of convenience, cost‐effectiveness, and environmental friendliness, positioning them as promising candidates for display applications. However, achieving the desired high efficiency and scalability for large displays with ultra‐fine pixels necessitates substantial progress beyond current experimental outcomes. This study showcases the application of AlGaN UV‐C microLED display panels and micro‐displays incorporating quantum dots (QDs) for color conversion. Sidewall treatment and atomic layer deposited (ALD) passivation effectively address dangling bonds and etching damages, leading to a notable enhancement of TM‐polarized light extraction efficiency (LEE). Moreover, dedicated strain modulation efforts successfully reduce the high Al content (over 50%) wafer bowling effect, facilitating the modularization of ultrafine‐pitch AlGaN UV‐C microLED panels. Consequently, the devices achieve a peak performance of over 5% external quantum efficiency (EQE) as the mesa size scales down to 3 μm. The highlighted 0.18‐inch UV‐C microLED display panels, featuring a 9 μm pixel size, are precisely controlled by a CMOS IC driver to achieve desired patterns. Serving as an efficient pumping source for perovskite quantum dots paper (PQDP), this UV‐C microLED display suggests the potential to revolutionize the full‐color display industry by providing an innovative and unconventional solution.
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