P-MNS-05 FRICTION ANISOTROPY BETWEEN DIFFERENT MATERIALS MEASURED UNDER HIGH-VACUUM CONDITIONS(Micro/Nanosystem Science and Technology,Technical Program of Poster Session)

Abstract

Friction force was measured between single-crystal silicon plates and a single-crystal-tipped gold pin under a high vacuum of 1.5×10^<-5> Pa. A reciprocating micro-tribotester was used to rub a gold pin that had a (111) and (100) surface on its spherical tip against the (111) and (100) surfaces of silicon plates, respectively. The external applied normal load was 10μN. By rotating the silicon plate, difference between each crystal orientation was changed and the relationship between the friction force and mutual angle was examined. A maximum anisotropy factor of about ten was found between the combinations of the (111) surfaces.