Abstract
In this research, after having studied the shapes and dimensions of micro-manipulators capable of a large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacement though the use of the suction phenomena. Moreover, our study suggested a manufacturing process using a minute manufacturing process and then discussed the concerns of the dimension of the manufactured mirror and beams, and the manufactured screw electrodes, and mirror support pyramid for the optical switch.
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Schedule a callMore From: Proceedings of JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE
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