Abstract

Spectroscopic ellipsometry (SE), high resolution transmission electron microscopy (HRTEM), atomic force microscopy (AFM) and optical transmittance measurements were used to study and establish a correlation between the open-circuit voltage (Voc) of solar cells and the p-layer optical band gap (Ep). It is found that the ellipsometry measurement can be used as an inline non-destructive diagnostic tool for p-layer deposition in commercial operation. The analysis of ellipsometric spectra, together with the optical transmittance data, shows that the best p-layer appears to be very fine nanocrystallites with an Ep 1.95eV. HRTEM measurements reveal that the best p-layer is composed of nanocrystallites ~9nm in size. It is also found that the p-layer exhibits very good transmittance, as high as ~91.6% at ~650nm. These results have guided us to achieve high Voc value 1.03V for thin film silicon based single junction solar cell.

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