Abstract
In this paper, we report the development and evaluation of a valve-less micropump using a tapered depth distribution of the diffuser structure. The diffuser structures made of PDMS were fabricated at two places in the microchannel using a gray-scale lithography and molding. A PDMS thin film was fabricated between two diffusers. Flowing liquid into one way is carried out by vibrating the PDMS film with a pneumatic pump owing to the channel resistance difference. By fabricating the tapered depth distribution, we can minimize the micropump.
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