Abstract
The objective of this study is to develop the SThM with the multifunctional cantilever probe. Firstly, we have improved the multifunctional cantilever probe to raise a fabrication yield of the probe and measurement accuracy. As a result, the sensitivity of the thermopile heat flow sensor of the new cantilever probe was corrected to three to four times higher value than that of the previous probe. Additionally, the heat flow that reflects the sample thermal conductivity was measured for some bulk and thin film materials. But the measured heat flow had the error range corresponding from 3 to 30 nm of contact radius. Therefore we will try to measure the heat flow for low asperity samples.
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