Abstract
There are two type evaporators such as cluster and inline equipped with linear sources in OLED manufacturing. The inline type evaporator has been used for WOLED and QD‐OLED and there is a glass substrate bending problem in 10G size manufacturing. The cluster type evaporator has been used for AMOLED and there is a shadow distance limitation to improve the display resolution. The belt plane source FMM evaporator and the vertical belt plane source evaporator equipped with three dimensional shape plane sources will be used for very high ppi (pixel per inch) AMOLED and 10G OLED TV device, respectively. They are the ultimate evaporator‐solutions.
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