Abstract
This paper makes a research on the relationship between TFT transmittance and white color uniformity, which based on 1st ITO process optimization. The results show that the better TFT transmittance uniformity leads to better white color uniformity, and the ITO oxidation is an important factor for TFT transmittance uniformity improvement. Annealing and increase oxygen flow during ITO sputtering when annealing is skipped are both the effective methods to obtain an excellent white color uniformity.
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