Abstract

We report on the – to our knowledge – first successful realization of Si0.54Ge0.45C0.012 p-channel MODFETs directly on Si without any SiGe buffer layer. The incorporation of small amounts of C into SiGe layers with high Ge content reduces the compressive strain, resulting in an improved stability, an increased band gap ΔEg and a sufficient valence band discontinuity ΔEV. Typical Hall mobilities and hole densities are μh(300 K)=113 cm2/V s, ps(300 K)=1.4×1012 cm−2, μh(77 K)=236 cm2/V s, ps(77 K)=0.9×1012 cm−2. Room temperature transconductances of gme=57 mS/mm and saturation currents of IDSS=40 mA/mm, and respective 77 K data of gme=70 mS/mm and IDSS=63 mA/mm are found for the 0.75 μm gate-length, non-recessed test devices, which have been fabricated in a non-self-aligned process.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.