P-25: Super Low Temperature Doping of Phosphorus to Poly-Si Thin Films Using XeF Excimer Laser Irradiation in Phosphoric Acid Solution

Abstract

In this paper, we report on super low temperature doping of phosphorus to poly-Si thin films using XeF excimer laser irradiation in a phosphoric acid solution. In this method, the implantation of P atoms and dopant activation can be performed simultaneously. We prepared poly-Si films with a thickness of 50 nm, and these films were crystallized using XeF excimer laser annealing. After laser doping, the concentration of P atoms in the poly-Si films was approximately 3.5 × 1018 cm−3, and the resistance of the poly-Si films decreased by approximately 0.003 times as compared with that before laser doping.