Abstract
We developed a large area and low cost optical fingerprint recognition product based on LTPS (low temperature poly silicon) process. A high efficient a‐Si pin sensor is introduced, the quantum efficiency under white light is 70% and the dark state current density is E‐10 A / mm2. The “one‐to‐one” and “one to multiple” structures of sensor and micro lens are compared, and the “one‐to‐one” optical path structure is systematically analyzed and evaluated. The optical path focal length is about 100 μm. The fingerprint recognition effect is significantly improved by adding a BM shading layer, and this scheme can effectively avoid the screen burning problem caused by the high luminous intensity of pixels in the fingerprint unlocking area.
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