Abstract
Close‐space sublimation (CSS) has been explored in the industry as an alternative pattern‐wise deposition technology to the traditional vacuum thermal evaporation (VTE) through a fine metal mask (FMM). Recent attempts of combining CSS and FMM have also demonstrated the possibility of achieving ultrahigh pixel density in RGB OLED display. However, the evaporation behavior of materials in CSS process and the quality of CSS‐deposited films as a function of CSS conditions have not been established. In this work, thin tantalum foils deposited with OLED materials were used as the donor plate in CSS process, and its temperature was finely controlled by passing current through the foil. The deposition rates of archetypal OLED materials like NPB and Alq3 as a function of temperature were recorded in a CSS setup and the morphology of CSS‐deposited films was characterized.
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