Ozone production by an He+O2 radio-frequency atmospheric pressure plasma jet driven by tailored voltage waveforms

Abstract

Atmospheric pressure plasma jets are efficient sources of reactive oxygen and nitrogen species with potential applications in medicine, materials processing, green industry and agriculture. However, selective control over the production of reactive species presents an ongoing challenge and a barrier to the widespread uptake of these devices in applications. This study therefore investigates the production of ozone by a radio-frequency plasma jet driven with tailored voltage waveforms composed of up to five consecutive harmonics, with a fundamental frequency of 13.56 MHz. The plasma is supplied with helium with small admixtures (0.1%–1.0%) of oxygen gas. The ozone density in the far effluent is measured with Fourier transform infrared spectroscopy and the gas temperature in the plasma channel is determined with optical emission spectroscopy. Voltage waveform tailoring is found to enhance the ozone density in the far effluent of the plasma jet in comparison to operation with single-frequency voltage waveforms. Increasing the number of applied harmonics in the driving voltage waveform for a fixed peak-to-peak voltage enhances the ozone density but significantly increases the gas temperature within the plasma channel. Meanwhile, increasing the number of applied harmonics while maintaining a constant RF power deposition allows the density of ozone in the effluent to be increased by up to a factor of 4 relative to single-frequency operation, up to a maximum density of 5.7 ×1014 cm−3, without any significant change to the gas temperature. This work highlights that tailored voltage waveforms can be used to control the density of ozone delivered through the plasma effluent, marking an important step towards realising the potential of these plasmas for applications.