Abstract
In this manuscript, we report an investigation into the sensitivity of two oxidizing gases (ozone and nitrogen dioxide) for nanocrystalline SrTi0.85Fe0.15O3 thin films deposited by the electron beam physical vapor deposition technique. Annealing treatment at 500°C enhanced the crystallization and surface roughness of the thin film. Electrical measurements revealed that the thin film was sensitive to oxidizing gases, especially to low ozone gas levels, exhibiting a fast response time, a short recovery time as well as good reproducibility and reversibility. These findings demonstrate the great potential of the SrTi0.85Fe0.15O3 compound to be applied as a selective ozone gas sensor.
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