Oxy-nitrides characterization with a new ERD-TOF system

Abstract

A new time-of-flight (TOF) camera was installed on Elastic Recoil Detection (ERD) measurement setup on the Tandem Accelerator at Université de Montréal. The camera consists of two timing detectors, developed and built by the Jyvaskyla group, that use a thin carbon foil and microchannel plates (MCP) to produce the start and stop signals. The position of the first detector is fixed at 18cm from the target, while the position of the second detector can be varied between 50 and 90cm from the first detector. This allows to increase time resolution by increasing the distance between the time-of-flight detectors or to increase solid angle by decreasing the distance. Moving the detector also helps determining the parameters such as the effective distance between detector foils and the delay time.Compared to the original system, which had only one timing detector and relied on a surface barrier energy detector to measure both the energy and the stop signal, in the new system the energy is now obtained from the timing signal with much better resolution, reaching ∼4nm near the surface. There is also no more need to keep track of the surface barrier detector calibration for each element, including the pulse height defect.We show examples of quantitative depth profiles of oxy-nitride layers that has been characterized with this new system. It allows quantitative depth profiling of targets that would be difficult to analyze with other techniques, especially when light elements such as hydrogen, carbon, or nitrogen are mixed in various proportions in a heavy element matrix.