Abstract
We present the modification of polydimethylsiloxane (PDMS) surface by titanium dioxide (TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) thin film coating and subsequent oxygen plasma treatment. TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> thin film was deposited on the prepared PDMS samples by reactive dc sputtering. Pure Ti target was sputtered under a mixture of argon and oxygen plasma, in which the argon to oxygen flow rate ratio is 1:4. Finally, TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> coated PDMS structures were treated by O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> plasma at a low plasma power of 6.8 Watt with different treatment times. The micro crack of TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> thin film observed by optical microscope was found to be uniformly distributed on the PDMS surface. The crystal structure of TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> investigated by X-ray diffraction (XRD) confirms that the structure TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> thin film on PDMS is amorphous. To characterize the hydrophilic property, the contact angle of PDMS and TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> coated PDMS were measured as a function of oxygen plasma treatment time. It was found that the contact angle of treated PDMS is dropped from 117 to 9 degrees after oxygen plasma treatment for 1 minute. While the contact angle of TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> coated PDMS is sharply dropped from 88 to 7.8 degrees after oxygen plasma treatment for 1 minute. Therefore, the improvement of hydrophilicity surface properties of PDMS is successfully obtained by TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> thin film coating and subsequent oxygen plasma treatment.
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