Abstract
For thin film synthesis of complex oxides, one of the most important issues has always been how to oxidise the material. For a technique like pulsed laser deposition, a key benefit is the relatively high oxygen background pressure one can operate at, and therefor oxidation should be relatively straightforward. However, understanding the microscopic oxidation mechanisms turns out to be rather difficult. In this perspective, we give a brief overview of the sources of oxidation for complex oxide thin films grown by pulsed laser deposition. While it is clear what these sources are, their role in the kinetics of the formation of the crystal structure and oxygen stoichiometry is not fully understood.
Highlights
The role of pulsed laser deposition for oxides became of significance with the announcement by the Venkatesan group in mid-1987 [1] that they were able to grow thin layers of the early-1987 discovered by Chu et al [2] high Tc material YBa2Cu3O7-d (YBCO)
In the seminal paper by Dijkkamp et al, it was recognised that with the technique pulsed excimer laser evaporation, superconducting films were produced of this material
It is clear that both the background gas used and its pressure play a prominent role in the temporal development of the plasma plume as well as the oxidation of the film material
Summary
The role of pulsed laser deposition for (superconducting) oxides became of significance with the announcement by the Venkatesan group in mid-1987 [1] that they were able to grow thin layers of the early-1987 discovered by Chu et al [2] high Tc material YBa2Cu3O7-d (YBCO). For complete reviews on the PLD technique, recommended texts are given in [25,26,27] From these studies, it is clear that both the background gas used and its pressure play a prominent role in the temporal development of the plasma plume as well as the oxidation of the film material. The effect of oxidation and termination on diffusivity cannot be explained by the existing models In this perspective, we will give a brief overview of the current state of knowledge on the origins of oxygen in complex oxide thin films grown by PLD (possibly relevant for other methods as well) and an outlook for the coming years on. We will not be able to answer all the above questions but instead we will highlight the important clues from experiment to stimulate the development of new models and experiments
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