Abstract
Previous studies have found that Ti3+ plays a key role in the photocatalytic performance of TiO2. In this paper, we propose a cost-effective technique to realize the tunable photocatalytic activity in Ti3+ doped TiO2 thin films by simply varying oxygen flow during the case of deposition. The factors of oxygen flow and annealing temperature to the ratio of Ti3+ in TiO2 thin films were discussed. The results showed that both absorption in UV region and the yield of hydrogen from water splitting increased with the oxygen flow and annealing temperature decreasing.
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