Abstract
The gas phase species produced in rf plasmas ofhexamethyldisiloxane (HMDSO), Si2O(CH3)6, diluted with oxygen,have been investigated. The complementarity of Fourier transform infraredabsorption spectroscopy and mass spectrometry allows the determination ofthe most abundant neutral components present in the discharge. Themeasurements reveal that methyl groups (CH3), abundantly formed by thedissociation of the HMDSO molecule, are the precursor for the mostabundant species which stem from two kinds of reaction. The first kind ofreaction is combustion of CH3 by oxygen-producing formaldehyde(COH2), formic acid (CO2H2), carbon monoxide (CO), carbon dioxide(CO2) and water. It is shown that high mass carbonated radicals, suchas SixOyCzHt, first diffuse to the surface and then the carbonis removed by oxygen etching to form CO2. The second is hydrocarbonchemistry promoted by CH3, producing mainly hydrogen (H2), methane(CH4) and acetylene (C2H2).
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