Abstract

Atomic line emission resulting from sputtered atoms and ions was investigated for 50–300 keV Ar+ ion bombardment of polycrystalline aluminum targets. In general, the measured light intensities are small for clean surfaces; for oxygen-covered surfaces an increase of the light intensity from neutral aluminum atoms by a factor of 20 was observed. These observations as well as previously observed spectral line shapes agree well with predictions of the resonance tunnel model.

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