Abstract
SrRuO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3-delta</sub> (SRO) films were deposited on SrTiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> substrates by an RF magnetron sputtering method and post-annealed in various conditions, and the relationship between their oxygen content, crystallinity, and the magnetic properties was studied. Oxygen content of SRO thin films was evaluated by a non-Rutherford elastic resonance scattering (NRERS) method. It was clarified for the present films that the coercivity does not depend on oxygen stoichiometry but depends on the existence of precipitates of ~10-nm size. We conclude that a high temperature annealing process urges the SRO film species to form grains of rather large size, which is the origin of a large coercivity. It was revealed that coercivity and conductivity of SRO films can be controlled independently by changing the annealing conditions
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