Abstract
Auger electron spectroscopy and principal component analysis have been used to study the first stages of titanium oxidation at low pressures. We found that titanium oxidizes from nearly the beginning of the process with an almost negligible stage of oxygen adsorption. The oxidation process is characterized by the presence of only one phase (titanium dioxide). We also found that the use of the ratio between Ti LMV and Ti LMM Auger transitions, to follow the titanium oxidation process, as it has been previously suggested, may lead to erroneous interpretations.
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