Abstract
Two different, commercial, thin, metallic layers, one with a submicron thickness, containing Zn and Al as the main constituents, were depth profiled using Auger electron spectroscopy (AES). Large, oxidation-state-dependent, kinetic-energy shifts of the Al KLL and Zn LMM peaks were used to evaluate the oxide state of the elements inside the layers. An attempt was also made to use the peak shapes of the respective peaks by fitting measured peaks using linear combinations of the peaks corresponding to the oxide and metallic states.
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