Oxide Mediated Epitaxy on Planar and Non-Planar Si

Abstract

ABSTRACTThe recently developed oxide mediated epitaxy (OME) technique involves the growth of epitaxial CoSi2 through a thin layer of silicon oxide grown in peroxide baths. Here we report improvements of the OME technique from the use of in-situ grown thermal oxide as the barrier layer and post-growth oxygen anneals. Growth of uniform epitaxial CoSi2 layers by OME on non-planar surfaces of selectively deposited CVD Si layers with oxide and nitride patterns was also demonstrated. Both the epitaxial orientation of CoSi2 and the thickness of the CoSi2 layer, measured along the deposition direction, remained unchanged across facet boundaries. OME appears well suited for shallow-junction silicidation application in devices involving raised source/drain structures.