Abstract
Experiments on the oxidation treatment of metal surfaces were conducted using atmospheric pressure non-equilibrium plasma. Oxidation of stainless steel, zirconium metal, and zirconium alloy were studied using plasmas of oxygen gas or water vapor. Analysis of the formed oxide films by Auger electron spectroscopy (AES) confirmed that magnetite is the main structure in the oxide layer on stainless steel and that the structure varied with plasma exposure time. Zirconium and its alloy were found to have only one oxide structure, zirconia, regardless of the plasma exposure conditions.
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