Abstract
Analyses of trace and major elements in Group III-V compound matrices by secondary ion mass spectrometry (SIMS) have shown that practical ion yields are related linearly to the matrix composition. The affinity of the matrix to oxygen appears to be the critical factor in this relationship. A direct relationship between the slopes of calibration lines, determined for elements in the same column of the periodic table, and the first ionization potential of the respective elements has also been shown.
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