Abstract
AbstractX‐ray photoelectron spectroscopy was used to study the oxidation of Cu by oxygen plasma generated from a Kaufman ion gun. It was found that Cu was much less oxidized in co‐evaporation with Ba or Nd compared to Cu‐only evaporation when the total flux density of supplied metals and the oxygen plasma conditions were similar. It was also found that elemental Ba or Nd deposited on a CuO film at room temperature deoxidized the CuO.
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