Abstract
Glow discharge in oxygen-containing gases (air, a mixture of O2/N2, N2O) was used for selective removal of amorphous hydrocarbon (a-C:H) films predeposited on stainless steel, W, and Mo. The gasification rate of films was maximal in N2O. H2, H2O, CO, and CO2 were plasmolysis products. Thin (3–30 nm) oxide layers, the thicknesses of which depended on the location of samples relative to plasma, formed on the metal after removal of the film.
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