Abstract
The microstructure of FePt thin films as a function of thermal annealing is investigated using a combination of X-ray diffraction (XRD) and transmission electron microscopy (TEM). Results show that Fe preferentially forms oxides at the alloy surface, leaving Fe bleached from the alloy film. The shift of the (111) diffraction peak of the L1/sub 0/ FePt phase in the XRD pattern is correlated with oxidation-induced composition change in the film. The change of magnetic properties of the film is also measured and can also be explained by the oxidation induced microscopic change.
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