Abstract

Fully dense polymer‐derived SiAlCN ceramics were exposed to pure water vapor flowing at the rate of 4.4 cm/s at 1100°C. Weight changes as a function of annealing time were recorded to illustrate the oxidation/corrosion behavior of the materials. The paralinear kinetic model was used to determine the parabolic and linear rate constants from the experimental data. The results show that the polymer‐derived SiAlCN ceramics have a much better water‐vapor corrosion resistance than pure silicon‐based ceramics.

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