Abstract
Quantitative dimensional measurements of micro- and nanometre-sized structures are urgently required from science and industry. Due to their very high vertical resolution (down to sub nanometres) and high lateral resolution (<10 nm) scanning probe microscopes (SPMs) are of great interest for such metrological applications. Additionally, SPM methods are able to measure surfaces in a number of modes like contact, intermittent-contact and non-contact mode. The forces between tip and sample are low during the measurement and, even in contact mode, reach only a few nanonewtons. This fact prevents scratching of the measured surface during the SPM scanning procedure even when very sharp tips are used.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
