Abstract
An overview of photon counting detection using CMOS compatible Single Photon Avalanche Diodes (SPAD) will be presented. These SPADs have a planar structure, and are processed using CMOS technology. The most promising aspect of this technology is the potential for building large area arrays that can be operated in photon counting mode - without the read-out noise and bulkiness associated with low noise CCD cameras. Using the iAQC (integrated Active Quenching Circuit) produced by Micro-Photonics Devices, a low noise InGaAs/InAlAs APD will be characterized for photon counting. Finally, Characterization data from a photon counting module using Intevac’s IPD’s (Tube+APD hybrd) will be presented for photon counting at 1064nm.
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