Overlay improvement in nanoimprint lithography for 1×-nm patterning

Abstract

Nanoimprint lithography (NIL) is becoming a promising technique for fine-patterning with a lower cost than other lithography techniques. High overlay accuracy is one of the issues in NIL. Using die-by-die alignment with moiré fringe detection, an NIL alignment measurement accuracy below 1 nm and an overlay accuracy below 5 nm have been reported. On the other hand, the requirement for overlay in 2020 is estimated to be 3–4 nm for dynamic random access memory, flash and logic devices. In order to make the overlay accuracy requirement qualify from the semiconductor industry, a lot of technology enhancements, such as the improvement of overlay control accuracy for NIL-tools, image placement accuracy improvement for NIL templates, mix and match technique of NIL, and other lithography tools such as immersion exposure ones, are needed. In this paper, the authors describe the evaluation of the NIL overlay performance using up-to-date NIL tools, and discuss the potentials of NIL overlay in the future. Alignment accuracy, precision, and overlay correction performance of NIL tools, NIL-to-NIL and NIL-to-optical lithography tool distortion matching performance and overlay error structure analysis, are discussed. From these analyses based on NIL overlay data, the authors discuss the possibility of NIL overlay evolution to realize the adaptation to mass production for the 1×-nm device.