Overcoming the field-of-view restrictions in soft x-ray holographic imaging

Abstract

We present a new concept for imaging by soft x-ray holography. Microscopylike imaging capabilities were achieved by the separation of mask and sample. The use of two independent silicon nitride membranes, one for the field-of-view-defining mask and the reference beam, and the other for the sample, allows to image different areas on the sample. The movement of the field-of-view across the sample is realized by a piezomotor-driven sample stage that permits relative and stable positioning with nm-precision. We demonstrate the capabilities of the x-ray holographic microscopy (XHM) technique by showing images with 60 nm spatial resolution of an artificially structured 100 nm thick gold film with a lateral size of 19 × 4 μm2.