Abstract
X-ray ptychography is a coherent diffraction imaging technique with a high resolving power and excellent quantitative capabilities. Although very popular in synchrotron facilities nowadays, its implementation with X-ray energies above 15 keV is very rare due to the challenges imposed by the high energies. Here, the implementation of high-energy X-ray ptychography at 17 and 33.6 keV is demonstrated and solutions to overcome the important challenges are provided. Among the particular aspects addressed are the use of an efficient high-energy detector, a long synchrotron beamline for the high degree of spatial coherence, a beam with 1% monochromaticity providing high flux, and efficient multilayer coated Kirkpatrick-Baez X-ray optics to shape the beam. The constraints imposed by the large energy bandwidth are carefully analyzed, as well as the requirements to sample correctly the high-energy diffraction patterns with small speckle size. In this context, optimized scanning trajectories allow the total acquisition time to be reduced by up to 35%. The paper explores these innovative solutions at the ID16A nano-imaging beamline by ptychographic imaging of a 200 nm-thick gold lithography sample.
Highlights
X-ray ptychography is an established high-resolution X-ray imaging technique in synchrotron radiation facilities worldwide (Ozturk et al, 2018; Holler et al, 2017; da Silva, Mader et al, 2015; da Silva, Trtik et al, 2015)
Recently we showed that ptychography could be implemented at 17 keV (Haubrich et al, 2018), which was combined with tomography, and at 33.6 keV, where it was used to characterize the smallest ever high-energy X-ray nanofocus
It can be implemented using an indirect detection system based on a scintillator screen optically coupled to a CCD or CMOS sensor, X-ray ptychography fully benefits from the high sensitivity and low noise of single-photon-counting direct detection systems
Summary
X-ray ptychography is an established high-resolution X-ray imaging technique in synchrotron radiation facilities worldwide (Ozturk et al, 2018; Holler et al, 2017; da Silva, Mader et al, 2015; da Silva, Trtik et al, 2015). In the case of the ID16A beamline, which is installed in a highsection of the storage ring, the source size is 970  $10 mm (H  V) assuming 4 nm  5 pm (H  V) emittance This implies the need for horizontal focusing optics to pre-focus the large source into a secondary source that needs to be far enough upstream of the sample to provide a long transverse coherence length at the sample position. Graphy at this beamline and our solutions to perform 2D ptychography and 3D imaging via ptychographic X-ray computed tomography (PXCT) (Dierolf et al, 2010) While they are developed in the context of a specific beamline, most solutions can be readily transposed to other facilities
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