Overcoming anomalous suppression of m-plane AlGaN growth by molecular-beam epitaxy using indium as a surfactant

Abstract

Anomalous growth rate reduction and associated composition divergence with increasing aluminum flux in m-plane AlGaN grown by plasma-assisted molecular beam epitaxy at low temperature (565 °C) are observed and investigated. We find that the AlGaN growth rate under conventional gallium-rich conditions decreases rapidly with increasing aluminum flux, contrary to expectations. Moreover, the aluminum fraction of these layers increases super-linearly with aluminum flux, indicating substantial nitrogen and gallium loss from the crystal surface. Indium surfactant assisted epitaxy (ISAE) is found to mitigate this effect significantly. ISAE AlGaN layers do not exhibit a significant decrease in the growth rate with increasing aluminum flux, and their aluminum compositions increase linearly with aluminum flux. Transmission electron microscopy (TEM) images reveal the presence of high-aluminum composition defects within the conventionally grown AlGaN layers, which are significantly reduced in ISAE AlGaN layers. Spatial correlation of these defects with local areas of reduced growth rate observed in an (In)Al0.30Ga0.70N/In0.16Ga0.84N multiple quantum well (MQW) structure suggests that these phenomena have a causal relationship. We attribute the growth rate reduction to the loss of nitrogen and gallium due to site-blocking effects of aluminum adatoms. TEM imaging indicates that high-quality, virtually defect-free (In)Al0.24Ga0.76N/In0.16Ga0.84N MQWs can be grown at 565 °C with negligible indium incorporation into the barriers.