Oven-controlled pressure sensor and its Mechanical aging

Abstract

On the purpose of enhancing the performance of piezoresistive pressure sensor and reducing the difficulty of temperature compensation, the oven-controlled technology and mechanical aging method is studied in this paper. To be high efficiency and low consumption of oven-controlled method, the MEMS chip without package is used to reduce the thermal resistance. Furthermore, six-week mechanical aging was applied on the sensor. It is shown the mechanical aging can effectively improve the performance of pressure sensor. When the aginged sensor chip was tested at a range of -45°C to 50°C, the designed sensor can measure the atmospheric pressure as an error less than ±0.2hPa with just consuming 0.8mW power.