Abstract
Inside Front Cover: For a wide range of plasma processes, stable plasma ignition of remote plasma sources (RPSs) is essential to ensure the stability of the discharge, stable operating conditions, and high plasma density. An RPS operating at a gas pressure greater than 1 Torr relies on the reaction pathways leading to the high-level excited state to sustain the power balance and energy cascade at a high input power level. Further details can be found in the article by Cheongbin Cheon, Jung Hwan Yoon, Sanghyun Jo, Ho Jun Kim, and Hae June Lee (e2100251).
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