Abstract
This paper describes the first solid outer frame lateral MEMS accelerometer designed to reduce both process and in-use stiction. The outrigger lateral accelerometer design connects the individual proof mass capacitive sense array cantilever beam tips to form a stiffened structural outer framework. The outer framework connection design enhancement significantly increases the vertical and lateral beam spring constant of the capacitive array sense fingers. This multi-clamped beam array, demonstrated by the outer frame design enhancement, offers an increase in vertical and lateral stiffness as compared to a singly clamped cantilever beam array comprised of similar dimensions and improved resistance to process and in-use stiction.
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