Abstract

Abstract. This paper presents the output decoupling property of planar flexure-based compliant mechanisms with symmetric configuration. Compliance/stiffness modeling methods for flexure serial structures and flexure parallel structures are first derived according to the matrix method. Analytical model of mechanisms with symmetric configuration is then developed to analyze the output decoupling property. The proposed analytical model shows that mechanisms are output decoupled when they are symmetry about two perpendicular axes or when they are composed of either three or an even number of identical fundamental forms distributed evenly around the center. Finally, output compliances of RRR and 4-RRR compliant micro-motion stages are derived from the analytical model and finite element analysis (FEA). The comparisons indicate that the results obtained from the proposed analytical model are in good agreement with those derived from FEA, which validates the proposed analytical model.

Highlights

  • Flexure-based compliant mechanisms, which have advantages of no friction, no backlash, compact and monolithic structure, and ease of fabrication, are usually used as micropositioning stages (Acer and Sabanovic, 2011; Li et al, 2013; Yong and Lu, 2009)

  • The analyses above indicate that the planar flexure-based compliant mechanisms are output decoupled when they are symmetric about two perpendicular axes

  • This paper presented the output decoupling property of planar flexure-based compliant mechanisms

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Summary

Introduction

Flexure-based compliant mechanisms, which have advantages of no friction, no backlash, compact and monolithic structure, and ease of fabrication, are usually used as micropositioning stages (Acer and Sabanovic, 2011; Li et al, 2013; Yong and Lu, 2009). A decoupled parallel flexure-based compliant mechanism means that one actuator produces only one directional output motion without affecting the motion of other axes. Du et al.: Output decoupling property of planar flexure-based compliant mechanisms. Nisms, the design of a totally decoupled one is first proposed in the literature (Awtar and Slocum, 2007) It presented parallel kinematic XY flexure mechanism designs based on systematic constraint patterns. There is rare analytical model which can prove the output decoupling property of flexure-based compliant mechanisms. The present study addresses the output decoupling property of planar flexure-based compliant mechanisms composed of notch flexure hinges. To analyze the output decoupling property of planar flexure-based compliant mechanism with symmetrical configuration, the compliance/stiffness modeling methods are derived firstly

Flexure serial structure
Flexure parallel structure
Output decoupling property
Symmetric configuration about x axis
Symmetric configuration about y axis
Symmetric configuration about x axis and y axis
The fundamental form
Variations
Application
Output compliance of the RRR micro-motion stage
Output compliance of the 4-RRR micro-motion stage
Validation
Findings
Conclusions
Full Text
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