Out-Of-Plane Direction Thermal Actuater for Optical Mems

Abstract

This paper shows two types of novel out-of-plane direction thermal actuators composed of only single crystal silicon for optical MEMS and also introduces two application examples. These thermal actuators have advantages of large force at low voltage, large displacement, high reliability and easy fabrication compared with other types of actuators. The first type of actuators could tilt the micro mirror with 1 mm in diameter 9.4-degree at 3.3 V. The latching mechanism by using the second type of actuators could strongly hold the optical shutter with 0.51 mm in diameter after 0.65 mm displacement. The latched state was kept over operational shock and vibration regulated by the reliability standard for optical communication devices.