Abstract
Stainless steel with its unique mechanical properties is the most frequently used material for manufacturing of vacuum chambers and components. Its disadvantage is hydrogen outgassing which makes obtaining of ultrahigh vacuum (UHV) troublesome. Vacuum annealing, prolonged in situ bake out, air bake, low-permeable coatings, and other, usually expensive methods, are applied to reduce the outgassing rate and the concentration of hydrogen. Recombination limited outgassing was shown to explain the required duration and temperature of bake out better than diffusion limited outgassing.
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