Out-of-Plane Translational PZT Bimorph Actuator with Archimedes’ Spiral Actuating Tethers

Abstract

The design, finite element analysis (FEA), and experimental characterization of a MEMS out-of-plane (vertical) translational lead-zirconate-titanate (PZT) bimorph actuator supported on Archimedes’ spiral tethers are presented. Two types of bimorph actuators with different electrode patterns (with spiral tethers half actuated or fully actuated) are designed and fabricated. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. Finite element analysis (FEA) was used to analyze and predict the displacements of both types of actuators. The deflections of both fully- actuated and half-actuated devices were measured experimentally to validate the design. At an applied voltage of 110V, the out-of-plane deflections of the actuators with half-actuated and fully-actuated tethers were measured at about 17 μm and 29 μm respectively, in good agreement with FEA predictions of 17.1 μm and 25.8 μm. The corresponding blocking forces are predicted as 10 mN and 17 mN by FEA.