Abstract
Non-contact ultrasonic motors (USM) show potential for future use, especially in the industrial fields because of its simple structure and quick response. It is therefore important to comprehensively understand their theoretical background so as to push this research forward. In this study, we shall fully explain and deduce the driving mechanism of a linear ultrasonic levitation transporting system. Oscillation equations from the initial exciting Langevin transducer and flexural traveling wave propagation on the linear guide were first established. Then the squeezing fluid movement between the linear guide and the levitating slider was analyzed. Next, after being excited by the progressing wave under corresponding boundary conditions, the related tangential velocity of the middle flow field was obtained. Finally, the validated experiment was set up to test slider velocity.
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