Abstract
Control of crystal orientation and diameter of vertically grown epitaxial Si nanowire arrays on Si substrate has been demonstrated using a combination of an anodic aluminum oxide (AAO) template and vapor - liquid - solid (VLS) growth using electrolessplated Au in AAO pores as a catalyst. The crystal orientation of the nanowire was investigated by transmission electron microscopy. A growth direction of the nanowire arrays was guided perpendicular to the surface of the substrate by the AAO template, and the crystal orientation of the nanowire arrays was selected using the single crystal Si substrate properly cut in desired orientation.
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